Inline Sputtering Systems with Vertical Transport Orientation

VISTARIS Sputtering Systems

The SINGULUS TECHNOLOGIES system with the brand name VISTARIS was developed for the requirements in the photovoltaic industry. Inline sputtering systems are important in today’s CIGS & CdTe thin- lm solar cell production. The VISTARIS system was designed to enhance the ef ciency of thin- lm solar cells, while cutting production costs by using the state-of-the-art technologies. For photovoltaic technology, SINGULUS TECHNOLOGIES develops and manufactures coating systems which can apply special layers and layer systems on different substrates.

Examples are transparent front or metallic back contact layers as well as multilayered precursors with a broad range of different materials. The main advantage of the system is that it can be used for vertical vacuum-based coating of glass substrates in solar and display industry. In the market for thin- lm photovoltaic SINGULUS TECHNOLOGIES adds another production stage to its range of processing systems for the manufacture of CIGS/CIS cells.

Main Features

  • Integrated power supply design
  • No carrier return system necessary
  • Fully vertical substrate transport
  • Special designed carrier transport system
  • Load and Unload of substrate from the same side of the machine
  • Usage of rotatable cylindrical magnetrons for highest utilization of target material
  • Temperature processing before and during deposition available
  • Gas separation by dynamic slit valves and/or by individual lock chambers
  • Smallest machine footprint thru turn chamber technology
  • Easy maintenance, low CoO
  • Fast target exchange, use any vendor target
  • Easy expansion possible
  • Vacuum base pressure: < 1 x 10-6 mbar
  • Typical process pressure: 2 - 5 x10-3mbar

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