Inline Sputtering Systems with Vertical Transport Orientation

The SINGULUS TECHNOLOGIES system with the brand name VISTARIS respond to demand in the photovoltaic industry especially for CIGS/CIS thin-film solar cells. The VISTARIS system for development and production tools is designed to enhance the efficiency of thin-film solar cells, while cutting production costs by using the state-of-the-art technologies. For photovoltaic technology, SINGULUS TECHNOLOGIES develops and manufactures coating systems which can apply special layers and layer systems on different materials. Inline sputter systems are important in today’s thin-film solar cell production.

Examples are transparent front or metallic back contact layers as well as multilayered precursors with a broad range of different materials. The main advantage of the system is that it can be used for vertical vacuum-based coating of glass substrates in solar and display industry. In the market for thin-film photovoltaic SINGULUS TECHNOLOGIES adds another production stage to its range of processing systems for the manufacture of CIGS/CIS cells.

Typical Target Materials for PV Application

  • Typical sputtering materials like ITO, AZO, CuGa, Cu, In, AZO, i-ZnO etc

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