Nano Deposition

SINGULUS TECHNOLOGIES, founded in 1996, continues to expand its activities in the segments Solar and Optical Disc. The goal is to attain a leading position in the silicon and thin-film solar technology as a machine supplier as well as a development partner for new cell concepts and to further extend the technologic leadership in the Optical Disc segment.

Through its Nano Deposition Technologies business unit SINGULUS TECHNOLOGIES, is a renowned manufacturer of advanced thin film deposition equipment for MRAM and Thin Film Head production.

From the very beginning the TIMARIS has been designed as a cluster tool. This concept is very common in the semiconductor industry and enables to accommodate several process modules at one central wafer handling platform. As a result, the TIMARIS is a very flexible machine, that can be configured exactly according to our customers' requirements.

SINGULUS TECHNOLOGIES is manufacturing the second generation of the TIMARIS PVD bridge tool, capable of handling all wafer sizes up to 300 mm diameter. Besides MRAM technology, SINGULUS has shipped and qualified a number of systems to the Hard Disk Drive industry for the volume production of Thin Film Heads (TFHs).