SINGULUS TECHNOLOGIES AG reports to have achieved a TMR performance of 73 % ΔR/R at 3 kΩ * µm² RA, depositing standard materials in a generic TMR layer stack deposited by their 300 mm TIMARIS PVD tool developed for MRAM production. This is one of the highest MR values measured so far for a wafer deposited in a commercial production PVD machine. Excellent TMR performance has also been obtained for mid-range RA (65% ΔR/R at 300 Ω * µm²) and in particular for the low RA range (35 % ΔR/R at 10 Ω * µm²) important for Thin Film Head - TMR production. The results have been measured on patterned wafers and by multi-probe CIP metrology. The design of the TIMARIS ensures that these results can be obtained without deterioration of the high throughput and the excellent costs of ownership of the tool.
SINGULUS TECHNOLOGIES launched its new TIMARIS platform at Semicon Europe one year ago. The TIMARIS was designed specifically to meet the production requirements in the application of TMR to semiconductor memories (MRAM) and for the future read elements in thin film heads for the hard disc drives. Additional interest for the TIMARIS is seen by other emerging semiconductor applications that require highly uniform thin films on 300 mm or 200 mm wafers.
Background
In just 8 years, SINGULUS TECHNOLOGIES’ dedication to its core optical disc business advanced the company from a management buy-out to world market leader and comprehensive supplier of optical data storage machines. Based on its unequivocal leadership in prerecorded CD and DVD replication lines, where it has attained a 50% market share, SINGULUS is now advancing into the markets for all optical storage media components. SINGULUS TECHNOLOGIES has secured new growth markets for its core vacuum coating technology. The company’s primary goal is the prioritization of its technological and systems leadership in all segments of its business.
Despite the enormous success of its core business, SINGULUS is no longer just a CD and DVD machine manufacturer. The application of its core "vacuum coating" competence provides decisive competitive advantages in other markets as well. The steps initiated by the company to participate in MRAM storage and TMR read/write head technology exemplify its capabilities.