Pressemeldung

Kahl am Main, August 17, 2010 - SINGULUS TECHNOLOGIES (SINGULUS) presents the SINGULAR PECVD tool for crystalline silicon solar cell production at the 25th EU PVSEC in Valencia, Spain. SINGULAR is a coating tool for the application of anti-reflection coatings (ARC) on crystalline silicon solar cells.

The innovative tool concept is based on static inline production which combines the advantages of inline substrate transport and static processing. It allows coating of complex layers, like layer stacks or gradients by keeping a continuous substrate flow. The process variability, the small tool foot print and high reliability guarantee high cell efficiencies, excellent total cost of ownership and high uptime.

The key of the tool is the PECVD inductively coupled plasma. The inductively coupled plasma excitation allows ideal control over film composition and density at high deposition rates. The cells produced with SINGULAR achieve excellent efficiencies and color uniformities. Several SINGULAR tools can be linked together to a SINGULAR system, consisting of up to three self-sufficient tools. Each SINGULAR has a throughput of up to 1,500 wafers/h. Hence, a SINGULAR system can reach a throughput of up to 4,500 wafers/h, partly keeping up its productivity during maintenance. Additionally a high uptime is achieved by applying automatic chamber cleaning.

Meet SINGULUS and STANGL in Valencia at the 25th EU PVSEC, Hall H2, Booth B11, on September 6-9, 2010 and see what we have to offer in the new solar age.