TADERIS

TADERIS – Here are the Benefits 

SINGULUS designs, manufactures and markets PVD and other production equipment for Magnetic Storage, Semiconductors, and other market segments. Singulus s new deposition tool TADERIS was designed in 2007 for high deposition rates of thick and thin alumina films, a core technology in the magnetic storage industry.  

TADERIS delivers superior and very competitive performance:
  • High deposition rate of 6.0 µ/h
  • Throughput of 6.0 wafer/h (10 µm thick film on ø 200 mm wafer)
  • Sputtering by pulsed DC Wafer gas cooling
  • ECWR plasma source for oxidation
  • Thickness monitor
The versatile platform, however, offers our customers additional process modules that address additional applications. According to TrendFocus, the Magnetic Storage Industry’s market review, this market will grow with a CAGR of 12.5 % over the next five years.

From 2006 to 2007, the shipment of HGA’s (Head Gimbal Assemblies, that carry the heads) grew by 175.5 % up to 1,669.6 million units. Along with the transition from GMR to AT/PMR hard disk drive technology, new deposition techniques have been developed and are under development.




At present, companies in this market are switching their wafer production from 6" (150 mm) to 8" (200 mm) to achieve further cost reductions. These factors result in a strong demand for new and more capable production equipment.