1 Transport cart (for in- and output)
- For up to two carriers
- For wet transport from/ to STANGL Pre-cleaner
- Discharge and filling at semi-automatic filling station at wet bench, minimized dripping due to optimized coupling devices
- Guide rolls matching to guidance system at STANGL Pre-cleaner
| | 2 Input buffer
- Static bath for wet buffering of carriers
- Capacity: 4 carriers
- Media: DI water, recycling water, or glycol
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3 Pre-clean bath
The wafer blocks are pre-cleaned in a patented
pre-clean bath. This comprises:
- Moving spray bars aside the wafer block (spray image
optimized for cleaning narrow gaps) - Quick dump of bath in 1 second or less
- Optionally: motoric tilting of carrier
- Optionally: ultrasonic treatment with dual frequency
- Overflow bath
- Media: DI water or recycling water + surfactant
- Fresh water consumption optimized by use of centrifuge recycling water
- Automatic cover
- All of the special elements of the Pre-clean bath can be individually programmed to fit your individual cleaning needs
| | 4 Deglue chamber
Any exposure to hazardous chemicals is minimized because in regular operation the process chamber is only loaded and unloaded when no acid is present.
- Recirculated overflow bath
- Capacity: 1 carrier
- Media: hot DI water or acid (e.g. acidic acid)
- Automatic cover with water sealing
- Acid is put in buffer tank during rinsing action
- Acid can be re-used several times
- All of the special elements of the Deglue chamber can be individually programmed to fit your individual deglueing needs for your glue.
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5 Output buffer
- Overflow cascade for wet buffering and final rinsing of carriers
- Capacity: 4 carriers
- Media: DI water
- Carriers are final-rinsed by passing through this
4-step DI cascade
| | 6 Installation area
- Fully PP covered installation area
- For electrics (fully encapsulated versus fluids)
- For process technology elements (pumps, dosage units, pneumatics, …)
- Media connection points
- For supply tanks
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7 Waste water pump stations (optional)
- If waste water cannot be disposed by gravity
- Flat reservoir tanks behind main machine
- Equipped with centrifugal pumps to provide necessary
pressure to lift waste water to desired disposal level - Full automatic control (no user interference necessary)
- Number of tanks depends on number of different waste water types
| | 8 Hot DI water station (optional)
- To provide main machine with hot DI water
- Used if fab does not have sufficient hot DI supply
- Equipped with high performance DI inline heater
- Equipped with hot DI water storage tank
(optionally equipped with an additional heating system) - Autonomous operation with own PLC station
- Communication to main automat via Profibus coupling
- Can be coupled to several pre-cleaners
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9 Surfactant dosage station
- To provide system with surfactant in pre-cleaning step
- High-precision dosage pump
- Equipped with 30 -60 liter buffer tank
- Can be connected to central supply line or to local surfactant drum (connection gear and suction pump included)
| | 10, 11 Water recycling station
10 Dirt and pure water tanks
11 Centrifuge
- All discharge water from the first half of the STANGL Pre-Cleaner can be given to this recycling system.
- The system consists of
- A professional centrifuge for separation of solid material from liquid
- Sludge cake cart for disposal of solid material
- Dirt water tank
- Pure water tank with heating system
- The system can process up to 200 l /min of dirt water
- By the use of this system total fresh DI consumption per wafer block is approx. 200 liters (depending on cleaning cycle)
- Autonomous operation with own PLC station
- Communication to main automat via Profibus coupling
- Optional support for recycling of the SiC/Si sludge
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