LINEA
Technical Features
| Main Features | LINEA WL-ISOTEX1500 | LINEA WL-ISOTEX3000 |
| Dimension L/W/H mm: Wet line Chiller station Mixing tank Option sump pump tank | 8640/2200/2300 1000/600/1500 800/800/2300 2000/500/600 per unit | 11610/2200/2300 1200/800/1500 1600/800/2300 2000/500/600 per unit |
| Capacity: 156 mm 125 mm | 6 lanes / 1700 wph 6 lanes / 2000 wph | 6 lanes / 3400 wph 6 lanes / 4000 wph |
| Wafer Material: | Si MC, 125x125 mm, 156x156 mm, >150 μm | |
| Utilities: | N2, CDA, DI-water, PCW, HF, HNO3, KOH, HCl, (additive) waste drains electrical power 400 VAC/3/PE | |
| Exhaust: | 5000 m3/h | 6500 m3/h |
| Typical Ablation/Side: | 4-6 µm | 4-6 µm |
| Main Features | LINEA WL-PSG1500 | LINEA WL-PSG3000 |
| Dimension L/W/H mm: Wet line Option sump pump tank | 4590/2200/2300 2000/500/600 per unit | 5670/2200/2300 2000/500/600 per unit |
| Capacity: 156 mm 125 mm | 6 lanes / 1700 wph 6 lanes / 2000 wph | 6 lanes / 3400 wph 6 lanes / 4000 wph |
| Wafer Material: | Si MC, CZ, 125x125 mm, 156x156 mm, >150 μm | |
| Utilities: | N2, CDA, DI-water, HF Waste drains electrical power 400 VAC/3/PE | |
| Exhaust: | 2500 m3/h | 3200 m3/h |
| Typical Ablation: | 50-250 µm | 50-250 µm |
| Main Features | LINEA WL-PSG-EE1500 | LINEA WL-PSG-EE3000 |
| Dimension L/W/H mm: Wet line Chiller station Mixing tank Option sump pump tank | 9180/2200/2300 1000/600/1500 800/800/2300 2000/500/600 per unit | 12420/2200/2300 1200/800/1500 1600/800/2300 2000/500/600 per unit |
| Capacity: 156 mm 125 mm | 6 lanes / 1700 wph 6 lanes / 2000 wph | 6 lanes / 3400 wph 6 lanes / 4000 wph |
| Wafer Material: | Si MC, CZ, 125x125 mm, 156x156 mm, >150 μm | |
| Utilities: | N2, CDA, DI-water, PWC, HF, HNO3, KOH, waste drains electrical power 400 VAC/3/PE | |
| Exhaust: | 5500 m3/h | 7000 m3/h |
| Typical Ablation: | 2-4 µm | 2-4 µm |