VITRUM GEN 2

The new VITRUM GEN 2 platform is a modular inline system for the processing of glass substrates. The modular design allows the easy integration of different process steps according to the requirements of CIS, a-Si or CdTe technology (etching, single side and pencil etching, cleaning, single side coating).

As part of the product family VITRUM GEN 2 the new processing machine simultaneously cleans back-sides and edges of thin film solar cells in a single working step. In addition to the automated process control, the new single-side etching tool protects the active layer by process hoods and performs pencil and rear side etching with brushes and chemicals. VITRUM GEN 2 is the only tool on the market that cleans the rear side and the edges in one single step without any harm to the active layers.

It is used for cleaning after oven processes as well as for etching of undesirable coatings on rear side and edges, for example CdTe or CdS.

Main Features

• New, modular design
• Up to 30 % cost reduction
• Better accessibility
• Smaller footprint
• Low cost of ownership
• High throughput
• High availability (uptime > 99* %)
• Standard and customer specific substrate sizes up to 2,600 mm
• Parallel carrier transport for higher throughput
• Reproducible process results