Semiconductor Applications

Typical TIMARIS configuration for 300mm semiconductor wafer production, consisting of:

• 4 Static PVD Modules
• 1 Pre-Clean Module
• 1 Transport Module (Brooks GX6000) including
  four FOUP Loadports 6 Express
• Multiple wafer handling
• Software integration: GEM / SECSII Interface
• Performance: MTBF > 250h, MTTR < 4h,
  Uptime > 85%