Press Release

Sternenfels, September 10, 2009: HamaTech APE GmbH & Co. KG, today announced that the MaskTrack Pro® TeraPure system has been selected for Nano-Imprint Lithography (NIL) cleaning requirements at DNP, the world's leading producer of semiconductor photomasks. Significant developments in cleaning technology and system design distinguish the MaskTrack Pro as the clear choice for Next Generation Lithography, 193i 22nm half pitch (hp) double-patterning (DPT), Extreme Ultraviolet Lithography (EUVL) and NIL.
 
“Pristine, defect-free master imprint masks are critical for low-cost NIL mask replication" said Mr. Naoya Hayashi, research fellow at DNP  “HamaTech is the one company in the industry today that has demonstrated the best cleaning technology for advanced master imprint mask and replica integrity requirements of tomorrow.  Our selection of the MaskTrack Pro TeraPure and collaborative research efforts with HamaTech and other industry partners provides us with access to innovative technology to meet the semiconductor industry’s emergent lithography demands for a production-ready NIL infrastructure at the 22nm hp node."

MaskTrack Pro combines the unequaled performance of MaskTrack, tool of record at advanced mask shops and semiconductor manufacturers around the world, with innovative cleaning technology and sophisticated equipment design for a mask integrity system focused on 193i 22nm hp DPT, EUVL and NIL.  The system features a unique combination of physical and chemical cleaning technologies for damage-free removal of organic and inorganic contamination from fragile structures (down to 20 nm) extending the lifetime of both master imprint masks and replica (Bacus, September 2009).  TeraPure is the only platform, designed specifically for NIL production that ensures defect-free master and replica at Point-of-Imprint, offering customers a dramatic increase in prints and maximum Nano-Imprint tool productivity.

“At HamaTech, we believe that it is essential to align with leaders in Next Generation Lithography and are honored by DNP’s choice of the MaskTrack Pro TeraPure for its critical cleaning technology research on NIL processes" said Wilma Koolen-Hermkens, CEO of HamaTech APE “TeraPure is the first system in the industry that can address NIL zero tolerance levels for particles and defects on the master mask and replica, securing pattern integrity and surface conditions for a cost-effective imprint.   DNP is our partner of choice to jointly develop the necessary processes of record (PORs) for the successful introduction of NIL." 

The TeraPure® Platform is scheduled for installation at the DNP facility in January 2010.  

About Dai Nippon Printing
DNP is a world-class comprehensive printing company with 1.5848 trillion yen in annual revenues and approximately 40,000 employees. Based in Tokyo, Japan, DNP offers a broad range of products and services for publishing, commercial printing, smart cards, networking, and electronics components, among others. Its products in the electronics field include color filters and other components for LCDs, photomasks, printed wiring boards and semiconductor-related components. In the photomask market DNP is a world leader, utilizing its time honoured printing techniques and know-how in the fabrication of cutting-edge photomasks.

About HamaTech APE
HamaTech is an established leader of semiconductor equipment.  At HamaTech we combine the latest technology with extensive know-how to provide systems that are future-compliant. HamaTech APE GmbH & Co KG is a wholly-owned subsidiary of SINGULS TECHNOLOGIES AG, Kahl/Main.

Short profile SINGULUS TECHNOLOGIES
SINGULUS TECHNOLOGIES is a market leader for Optical Disc production lines and is the only manufacturer globally to offer the complete range of products, mastering, molding and replication lines.

In addition, to the further development of the core activities of Optical Disc, the diversification into new work areas is the most important target.  

Through its daughter company HamaTech APE GmbH & Co. KG the Semiconductor and Magnetic Storage Industries are served. For well over 20 years, HamaTech APE is the acknowledged world market leader for Photomask cleaning, bake and develop. With the acquisition of the STANGL AG, SINGULUS successfully entered the solar equipment market.