SINGULUS TECHNOLOGIES, the German world market leader for optical discs based in Kahl/Main, launches its new TIMARIS thin film sputtering system dedicated to TMR (Tunnel Magnetic Resistance) technology – either for the semiconductor application MRAM (Magnetic Random Access Memory) or for future read elements in Thin Film Heads for hard disc drives. TMR elements consist of a stack of extremely thin layers (as thin as 1 nm and below) of ferromagnetic and nonmagnetic metallic films and an insulating barrier.
SINGULUS TECHNOLOGIES' newly developed TIMARIS PVD Bridge system (200 mm and 300 mm capability) fulfils all the requirements of TMR multi layer deposition under semiconductor production environment. Essential elements of the TIMARIS cluster tool are:
- Linear Dynamic Deposition to achieve the required very good uniformities of film thickness and of TMR properties across 300 mm wafers
- Linear Dynamic Deposition to control film thickness down to sub 0.1 nm scale
- Up to two 10-target-modules, UHV 5*10-9 mbar, to achieve high throughput (approximately 25 wafer/h based on a generic TMR layer stack (Ta 5/NiFe 2/ IrMn 10/NiFe 3/Ru .7/NiFe 2.5/CoFe .5/ Al 1.3 Æ Ox 20s /NiFe 3.5/Ta 10)
- One oxidation module using ECWR low energy plasma oxidation to produce perfect tunnel barriers
- One Surface-Smoothing and Pre-Clean module, using ECWR technology
- State-of-the-art handling platform (including atmospheric handling and FOUP’s depending on fab environment)
- Small footprint, high target utilization, high coating efficiencies to achieve Low Cost of Ownership
SINGULUS TECHNOLOGIES will present its new TIMARIS activities at the Semicon Europe, Munich, from 01.04. - 03.04.2003, Hall B 2, Booth 558.
Background of MRAM
The race is under way for a new memory - memory that is universal: non-volatile, much faster than DRAM, infinite data retention, infinite read/write cycles and ultra-low power consumption. MRAM is the hottest candidate: Unlike conventional DRAMs (Dynamic Random Access Memory), the MRAM retains stored information even if deprived of power (non – volatility). It consumes significantly less energy than DRAM or SRAM chips. First MRAM products specify short read and write cycles at write cycle endurance > 1015. These properties among others favour MRAM ultimately to replace Flash, SRAM, DRAM and, as some bold researchers dream, even hard disc drives. Applications exist everywhere: revolutionary advances in computer technology, particularly for laptops and "smart" hand-held devices such as PDA's, UMTS cell phones, etc. Indeed a huge emerging market for the semiconductor industry and on the cusp of the 300 mm era an enormous chance for a wafer fabrication equipment supplier. Semiconductor manufacturers around the world such as IBM, Infineon, Motorola, Micron, Samsung, and NEC to name a few, are working on the development and future commercialisation of MRAM technology.
Background about SINGULUS
SINGULUS TECHNOLOGIES AG, founded in a classic buy-out from the former LEYBOLD in 1995, is now a corporation with worldwide operations headquartered in Germany's Rhein-Main region. It manufactures the full spectrum of metallizers and replication lines for all optical disc formats, such as CD/CD-ROM, CD-R, DVD-R, as well as rewritable CD and DVD formats. SINGULUS TECHNOLOGIES is solidly positioned as an innovator and active participant, in the growing optical disc market and has attained the world market leadership position for optical data storage replication lines. Superior technology highly qualified employees will enable us to play a pivotal role in all future innovations in the optical data storage arena. A highly-qualified and experienced team at SINGULUS initiated and implemented the development of the TIMARIS sputtering system for production of MRAM chips and thin film heads for hard disc drives.