SINGULUS TECHNOLOGIES, the German world market leader for optical disc replication systems, based in Kahl/Main, launched at Semicon Europe its new TIMARIS dedicated to TMR (Tunnel Magnetic Resistance) technology – either for the semiconductor application MRAM (Magnetic Random Access Memory) or for future read elements in Thin Film Heads for hard disc drives.
After a short period of commissioning, this unique tool has already delivered world class material uniformity and exceptional uniformity for the ultra thin Aluminum layer critical to MRAM and TMR applications. MRAM, Magnetic Random Access Memory is an emerging non-volatile memory device promoted by Motorola and other leading semiconductor companies. The first TIMARIS system is equipped to handle 150 and 200 mm wafers as required by today’s markets, the second system will process 300 mm wafers. First data on patterned structures shows that the tool can already deliver competitive DR/R with good uniformity across a 200 mm wafer. Full customer trials are in progress.
The SINGULUS TECHNOLOGIES TIMARIS, uses a 200/300 mm bridge platform and meets the demanding requirements of semiconductor device production. The unique Linear Dynamic Deposition provides precision multi-layer processing on 300 mm wafers using 10 sputter-targets, fitted into one deposition chamber. The fully equipped system has two deposition chambers and separate modules for soft oxidation, wafer pre-clean and surface smoothing, using an ECWR plasma process. The four module system throughput is > 25 wfrs/hr. Low cost of ownership is guaranteed with the small footprint, the high target utilization and the high coating efficiencies that the TIMARIS offers.
SINGULUS TECHNOLOGIES will present the TIMARIS activities at the Semicon West, San Francisco, from June 14-16, 2003, South Hall, Booth 1742.
Background about SINGULUS
SINGULUS TECHNOLOGIES AG, founded in a classic buy-out from the former LEYBOLD in 1995, is now a corporation with worldwide operations headquartered in Germany's Rhein-Main region. It manufactures the full spectrum of metallizers and replication lines for all optical disc formats, such as CD/CD-ROM, CD-R, DVD-R, as well as rewritable CD and DVD formats. SINGULUS TECHNOLOGIES is solidly positioned as an innovator and active participant, in the growing optical disc market and has attained the world market leadership position for optical data storage replication lines. Superior technology and highly qualified employees will enable us to play a pivotal role in all future innovations in the optical data storage arena. A highly-qualified and experienced team at SINGULUS initiated and implemented the development of the TIMARIS sputtering system for production of MRAM chips and thin film heads for hard disc drives.