SINGULUS TECHNOLOGIES, the German world market leader for optical disc replication systems and manufacturer of advanced automated wafer fabrication systems, has extended its product range to include emerging semiconductor applications.
To leverage the market introduction of the new TIMARIS tool for the production of MRAM – the most promising of the next generation of non-volatile memory - the company, based in Kahl/Main, has established an application lab and clean room complete with two of the new 10 target PVD tools for process and equipment development. In addition to the deposition machines, a wide range of film inspection instruments have been installed to ensure tool and process qualification, including a KLA – Tencor TBI, a 300 mm MOKE mapper, VSM, AFM and others.
A key strategy in the overall programme has been the immediate step to a 300mm wafer format - essential for the coming generation of semiconductor process tools. Presently one of the TIMARIS machines is configured for 200 mm applications and has been operational since March 2003. The second system commenced operation in August 2003 - the world’s 1st fully equipped tool for 300 mm MRAM applications.
The TIMARIS uses a unique deposition concept which delivers exceptional uniformity and thickness control for the ultra thin barrier layer critical to MRAM and other TMR applications. At the heart of the forward thinking design is linear dynamic deposition technology and this single innovative design choice has enabled the exceptionally fast progress in process development to meet the challenges of new semiconductor applications. The tool gives the user class leading performance for TMR layer stacks in throughput, magnetic alignment and added cost per wafer.
With the market introduction of the TIMARIS bridge tool, SINGULUS TECHNOLOGIES can now offer a process qualified, high throughput PVD manufacturing tool for MRAM and TFH production and other applications in the semiconductor industry.
Background
In just 8 years, SINGULUS TECHNOLOGIES’ dedication to its core optical disc business advanced the company from a management buy-out to world market leader and comprehensive supplier of optical data storage machines. Based on its unequivocal leadership in prerecorded CD and DVD replication lines, where it has attained a 60% market share, SINGULUS is now advancing into the markets for other storage media components. SINGULUS TECHNOLOGIES has secured new growth markets for its core vacuum coating technology. The company’s primary goal is the prioritization of its technological and systems leadership in all segments of its business.
Despite the enormous success of its core business, SINGULUS is no longer just a CD and DVD machine manufacturer. The application of its core „vacuum coating“ competence provides decisive competitive advantages in other markets as well. The steps initiated by the company to participate in MRAM storage and TMR read/write head technology exemplify its capabilities.