R&D
For applied R & D application SINGULUS is offering a new vacuum deposition system. With the new sputter deposition system ROTARIS, SINGULUS is closing a gap.Pure R&D systems do not have compatibility to standard semiconductor manufacturing equipment which is needed for applied research to develop specific films, stacks of such films and material composition and to integrate them into real CMOS devices.
SINGULUS TECHNOLOGIES introduces the new universal sputter deposition machine to the market under the product name ROTARIS.The new system has been designed especially for research and development in the semiconductor industry and other more general applications. In order to further develop the MRAM storage technology to market maturity and for other applications in the semiconductor industry, many respective research institutions are in need of flexible R&D platforms such as the SINGULUS’ Nano-deposition machine.
