Example Batch to Inline 1
- Manual loading with automatic position correction and transfer into following system
- Automatic transfer of previous system to
following conveyors or buffering into ACI cassette or stacker boxes - Transfer capacity 1,500 wafers/hour
- Wet bench final clean
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Example Batch to Inline 2
- Automatic transfer from ACI
cassettes into wet isotexture or PSG - Automatic transfer of wet isotexture
or PSG into ACI cassette or
stacker boxes - Automatic transfer from or to
previous or following system - Transfer capacity 3,000 wafers/hour
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Example Inline to Inline
- Automatic transfer from PSG into PECVD tool
- Unloading from clocked or continuous parallel conveyors with direct
transfer to PECVD tool - Intermediate storage capacity by cassette 500 to 1,000 wafers with feed
in or feed out capability - Transfer capability of 1,500 or 3,000 wafers/hour
Example Inline to multiple Inline
- Automatic transfer between multiple inline systems
- Transfer from clocked or continuous parallel conveyors to multiple parallel or single conveyors
- Optionally intermediate storage with feed in or feed out capability
can be easily retrofit - Transfer capability up to 3,600 wafers/hour
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