- For cells mono and multi cell, sizes 125 x 125 mm and 156 x 156 mm
- Output up to 1,500 wafers/h for one SINGULAR
- Up to three SINGULAR for a production line (up to 4,500 wafers/h)
- High uptime due to inline chamber cleaning
- Efficient raw material consumption
- Optimized for lowest cost of ownership
- Integrated automatic carrier loading/unloading system
- Modular, highly integrated design
- Short installation and ramp-up time
- Small footprint
Fast, Economical, Flexible SINGULAR is a redundant modular system,
consisting of one, two or three self-sufficient
SINGULAR linked to a production line. Each
SINGULAR has an output of up to 1,500 wafers/h and is able to maintain its productivity during maintenance of other SINGULAR.
Additionally, uptime is high due to automatic inline chamber cleaning that does not interrupt the throughput during production.
The SINGULAR has its own proprietary automated handling for loading and unloading the wafers gently into the production carriers to minimize wafer breakage.
Controlled, Precise, Intelligent The proven SINGULUS servo concept provides
cycle time optimized motion paired with a high
level of reliability (> 8,500 installed SINGULUS
systems worldwide).
The SINGULAR is prepared for “Manufacturing
Execution System” (MES).
Compact, Clean, User-Friendly All vacuum pumps, electrical cabinets and
power supplies are integrated into the machine
frame, resulting in a small footprint with excellent accessibility.
The loading area includes a clean room to prevent contamination of the transported and processed wafers.
The SINGULAR conforms to CE, UL regulations
and Semi S2 compliant. Operation is easy, with
a touch screen and intuitive user interface.
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