Introduction | TIMARIS Modules | Applications | TIMARIS II | TIMARIS III | Literature

PVD Production Platform for Semiconductor & Magnetic Storage

Deposition of Ultra-thin Metallic and Insulating Films down to a Thickness of one Nanometer and below and Stacks of such Films with very Precise Material Thickness and High Uniformity Specifications

SINGULUS TECHNOLOGIES is a renowned manufacturer of advanced thin-film deposition equipment for MRAM, thin-film head, sensor and other semiconductor applications. It is the trusted partner in the respective industry and extends its leadership in the thin-film deposition technology for semiconductor applications.

SINGULUS has already established and qualified the second generation of the TIMARIS PVD Cluster Tool platform in the market and is offering a complete portfolio of process modules for different applications.

As of today, more than ten process modules are available to configure a TIMARIS system according to customer needs. These modules include the Multi-Target-Module (MTM), Oxidation-Process-Module (OPM), Pre-Clean- Module (PCM), Combi-Process-Module (CPM), Four-Target-Module (FTM) and Static-Deposition- Module (SDM) as well as the Rotating-Substrate- Module (RSM). The RSM is the core module of the ROTARIS platform, our sputtering system for special R&D applications.

The TIMARIS PVD modules (MTM, FTM, SDM and RSM) incorporate the full scope of sputtering techniques as: DC magnetron sputtering, pulsed DC magnetron sputtering and RF magnetron sputtering as well as combinations of these modes are selectable by recipe.