SELENIUS

Processing Systems for Evaporation of CIGS Thin-Film Solar Cells

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Evaporation System for Thin-Film Solar

The inline co-evaporation tool is based on the thermal evaporation of CIGS-related precursor materials. It is dedicated to the deposition of copper-indium-galliumselenium layers for the purpose to form optimum precursor layers in the application of CIGS thin-film solar modules.The evaporation system consists of a handling station, multiple substrate heating/cooling stations and deposition chambers.

The inline evaporation system is offering proven thermal deposition technology, that delivers a high material utilization and excellent layer uniformities. In combination with a high uptime and yield, the system leads to a highly optimized and flexible production platform.

Main Features

• Inline evaporation tool with high throughput capability

• Modular chamber design for a flexible layout conception to meet the production requests of the customer

• Optimized utilization of evaporation material through unique chamber design

• High deposition rate and repeatability

• Excellent flux uniformity

• Easy and fast source refilling/replacement due to user friendly source positioning

• Optimized maintenance concept for maximum machine availability/uptime

• Excellent temperature uniformity during process sequence

• Substrate Pre-Heating

• In-situ monitoring of flux and temperature

• Proven safety concept based on solid risk management and safety engineering