Processing Systems for Evaporation of CIGS Thin-Film Solar Cells

Download Brochure

Evaporation System for Thin-Film Solar

The inline co-evaporation tool is based on the thermal evaporation of CIGS-related precursor materials. It is dedicated to the deposition of copper-indium-galliumselenium layers for the purpose to form optimum precursor layers in the application of CIGS thin-film solar modules.The evaporation system consists of a handling station, multiple substrate heating/cooling stations and deposition chambers.

The inline evaporation system is offering proven thermal deposition technology, that delivers a high material utilization and excellent layer uniformities. In combination with a high uptime and yield, the system leads to a highly optimized and flexible production platform.

Main Features

  • Inline evaporation tool with high throughput capability
  • Modular chamber design for a flexible layout conception to meet the production requests of the customer
  • Optimized utilization of evaporation material through unique chamber design
  • High deposition rate and repeatability
  • Excellent flux uniformity
  • Easy and fast source refilling/replacement due to user friendly source positioning
  • Optimized maintenance concept for maximum machine availability/uptime
  • Excellent temperature uniformity during process sequence
  • Substrate Pre-Heating
  • In-situ monitoring of flux and temperature
  • Proven safety concept based on solid risk management and safety engineering

Wir verwenden Cookies die notwendig sind, um die Funktionsfähigkeit und Sicherheit dieser Website sicherzustellen. Für statistische Zwecke verwendet Singulus Technologies Cookies von „Google Analytics“. Über den Button rechts können Sie sich damit einverstanden erklären. Weitere Informationen finden Sie unter diesem Link.