Vacuum Evaporation Tool

for Thin-Film Solar

The vacuum evaporation tool is based on the thermal evaporation of all CIGS-related precursor materials. It is dedicated to the deposition of copper-indium-gallium-selenium layers for the purpose to form optimum precursor layers in the application of CIGS-thin-film solar cells. The vacuum evaporation tool consists of a handling station, multiple heating/cooling stations and deposition-chambers.

The vacuum evaporation tool is offering leading-edge thermal deposition technology for CIGS, that delivers a high material utilization and excellent layer uniformity. In combination with a high uptime and mechanical yield, the tool leads to a highly optimized and flexible production platform for evaporation of CIGS modules.

Main Features

High throughput capability
Modular chamber design
Flexible layout conception to meet the production requests of the customer
Optimized evaporation source utilization through unique chamber design (minimized wall deposition)
High deposition speed and repeatability
Excellent flux uniformity
Easy and fast source refilling/replacement
Excellent temperature uniformity
Substrate pre-heating
In-situ monitoring of flux and temperature