Vacuum Evaporation Tool

for Thin-Film Solar

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The vacuum evaporation tool is based on the thermal evaporation of all CIGS-related precursor materials. It is dedicated to the deposition of copper-indium-gallium-selenium layers for the purpose to form optimum precursor layers in the application of CIGS-thin-film solar cells. The vacuum evaporation tool consists of a handling station, multiple heating/cooling stations and deposition-chambers.

The vacuum evaporation tool is offering leading-edge thermal deposition technology for CIGS, that delivers a high material utilization and excellent layer uniformity. In combination with a high uptime and mechanical yield, the tool leads to a highly optimized and flexible production platform for evaporation of CIGS modules.

Main Features

  • High throughput capability
  • Modular chamber design
  • Flexible layout conception to meet the production requests of the customer
  • Optimized evaporation source utilization through unique chamber design (minimized wall deposition)
  • High deposition speed and repeatability
  • Excellent flux uniformity
  • Easy and fast source refilling/replacement
  • Excellent temperature uniformity
  • Substrate pre-heating
  • In-situ monitoring of flux and temperature










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