The Solution to Optimize your Profit
PERC (Passivated Emitter and Rear Cell) is currently the only industrially, economically justifiable cell power increasing technology that meets the requirements for a good balance between manufacturing costs (US$/W) and efficiency, thus securing interesting payback periods for the investment.

SINGULUS presents PERCEUS, a production solution for rear side passivated silicon solar cell. PERCEUS was developed to upgrade existing cell production lines to manufacture PERC-type silicon solar cells (PERC – Passivated Emitter and Rear Cells).

SINGULUS TECHNOLOGIES offers additional process steps for the production upgrade PERCEUS.

  • A wet-chemical process step polishes the rear side of the cell using a LINEX Single Side
    Polish Etch.
  • The dielectric passivation layer on the rear of thesolar cell, consisting of a layer stack of ICP-AlOx and SiNx, is coated by the ICP-PECVD production tool SINGULAR XP.
  • For the final step, the rear contact formation done by Laser Contact Opening (LCO), SINGULUS TECHNOLOGIES is cooperating closely with partners.With the integration of these additional production steps into existing production lines, PERC cells with efficiencies over 22 % can be made.

SINGULAR - Fully Automized ICP-PECVD Production Platform

LINEX - Inline Wet Process Equipment for Cleaning,Texturing and PSG Removal


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